Title:
マイクロチャンネルプレートを用いた検出器
Document Type and Number:
Japanese Patent JP4429750
Kind Code:
B2
Abstract:
A mass spectrometer detector having a coupling capacitor including an anode that is placed at a high potential of say -4.9 kV. An annular electrode is placed outside the anode. A voltage of say -5 kV is applied to the annular electrode. This reduces the potential difference between the anode and the annular electrode, mitigating the electric field. A peripheral electrode is mounted on the outer fringe of a dielectric body and stably held at a potential of say -2.5 kV, for example, by voltage-dividing resistors.
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Inventors:
Takayuki Suzuki
Kudo Master
Atsushi Tamura
Kudo Master
Atsushi Tamura
Application Number:
JP2004023683A
Publication Date:
March 10, 2010
Filing Date:
January 30, 2004
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
G01T1/28; H01J43/12; G01T7/00; H01J43/00; H01J43/24; H01L21/027
Domestic Patent References:
| JP6028997A |
Attorney, Agent or Firm:
Fujiharu Ijima
Nobushige Samejima
Nobushige Samejima