Title:
DETERGENT
Document Type and Number:
Japanese Patent JP2018199767
Kind Code:
A
Abstract:
To provide a detergent that has low metal corrosiveness, is less likely to foam during cleaning, prevents metal contamination of a substrate, and has no restrictions in pH at the time of use.SOLUTION: A detergent contains an aniline polymer having an acidic group, and water, and is suitable as a detergent for a flat panel display substrate or semiconductor device substrate.SELECTED DRAWING: None
Inventors:
UZAWA MASASHI
SAEKI SHINJI
YAMAZAKI AKIRA
IRIE YOSHIKO
SAEKI SHINJI
YAMAZAKI AKIRA
IRIE YOSHIKO
Application Number:
JP2017104436A
Publication Date:
December 20, 2018
Filing Date:
May 26, 2017
Export Citation:
Assignee:
MITSUBISHI CHEM CORP
International Classes:
C11D7/22; C08G73/00; H01L21/304
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Suzuki Mitsuyoshi
Tadashi Takahashi
Suzuki Mitsuyoshi