Title:
DEVICE FOR CLAMPING AND HOLDING FLAT SUBSTRATE
Document Type and Number:
Japanese Patent JP3970359
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To make it possible to particularly rapidly and reliably clamping and holding substrates in and out of a vacuum chamber and to make particularly inexpensive production and electrical control possible.
SOLUTION: Magnets 11, 12 are respectively immovably arranged at the ends of grippers 4, 5 on the side opposite to the substrate 3. These magnets 11, 12 move cooperatively with an electromagnet 13 disposed above the magnets 11, 12 in a casing 20. The magnetic field axial line of the electromagnet 13 is aligned to the longitudinal axial line L of the casing 20. The electromagnet 13 moves the ends of the grippers having the magnets 11, 12 back and forth between two stoppers 16 and 17 according to the polarities of the electromagnet 13.
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| JPH0741942 | SPUTTERING DEVICE |
Inventors:
Michael Rising
Stephan Kempuf
Michael koenig
Stephan Kempuf
Michael koenig
Application Number:
JP21481796A
Publication Date:
September 05, 2007
Filing Date:
August 14, 1996
Export Citation:
Assignee:
Unaxis Deutschland Holding GmbH
International Classes:
C23C14/50; B65G47/90; (IPC1-7): C23C14/50
Domestic Patent References:
| JP9104979A |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Reinhard Einsel
Toshiomi Yamazaki
Reinhard Einsel