Title:
DEVICE, CONTROL METHOD OF DEVICE, AND CONTROL PROGRAM OF DEVICE
Document Type and Number:
Japanese Patent JP2020045982
Kind Code:
A
Abstract:
To effectively control the movable stage used for placing an object, for example, so that the gap of an air slider, used for the slider, is maintained.SOLUTION: The device comprises: a stage for placing an object; a plurality of rails; and one or a plurality of sliders provided each of the plurality of rails. Each slider is floated from the rail to support the stage by jetting high pressure fluid toward the rail. The device further comprises: a plurality of adjusting valves for adjusting the pressure of fluid supplied to the slider; and a plurality of distance sensors for detecting the distance of the gap between the rail and the slider. The device further comprises a control circuit, the control circuit for each slider, a determination including a comparison between the gap distance and the first threshold is performed, when the gap distance is smaller than the first threshold, the presence abnormal is determined, the adjusting valve is adjusted so that the fluid with increased pressure is supplied to the slider where the abnormal is detected.SELECTED DRAWING: Figure 1
Inventors:
NUKADA HIDEKI
Application Number:
JP2018174929A
Publication Date:
March 26, 2020
Filing Date:
September 19, 2018
Export Citation:
Assignee:
NUFLARE TECHNOLOGY INC
International Classes:
F16C32/06; F16C29/02; H01L21/68
Attorney, Agent or Firm:
Kurata Masatoshi
Nobuhisa Nogawa
Takashi Mine
Naoki Kono
Tadashi Inoue
Ukai Ken
Nobuhisa Nogawa
Takashi Mine
Naoki Kono
Tadashi Inoue
Ukai Ken