Title:
DEVICE FOR CONTROLLING STRAIGHT MOVEMENT
Document Type and Number:
Japanese Patent JPH04143609
Kind Code:
A
Abstract:
PURPOSE:To stabilize a laser beam and to enable attainment of a movement control being compact and excellent in operability by separating a linear reference element from a straight-advance movement mechanism element on the side to be controlled and by holding it in a vacuum chamber. CONSTITUTION:A detection signal of a position sensor 21 enters a differential amplifier 32 through current-voltage converters 31A and 31B and it is sent from an amplifier 33 to a piezoactuator 4A which controls displacement in the vertical direction. A detection signal of a position sensor 22 is sent to an actuator 4B controlling a tilt angle, likewise, through current-voltage converters 34A and 34B, a differential amplifier 35 and an amplifier 36, and thereby the attitude of a cantilever 2 is controlled. Herein a linear reference element 200 having a laser 14 is converted with a vacuum chamber 17, and therefore a laser beam 12 is shielded from an air flow and stabilized. Accordingly, the precision in a straight advance of the cantilever 2 being a moving body on the side to be controlled, which uses the beam as a linear reference, is increased and thus the precision in measurement by a displacement sensor 1 can be improved.
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Inventors:
TAKITANI TOSHIO
FUJITA TSUTOMU
TAKAMATSU SHIGEO
FUJITA TSUTOMU
TAKAMATSU SHIGEO
Application Number:
JP26765790A
Publication Date:
May 18, 1992
Filing Date:
October 04, 1990
Export Citation:
Assignee:
HITACHI SHIPBUILDING ENG CO
International Classes:
G01B11/30; G05D3/00; (IPC1-7): G01B11/30; G05D3/00
Attorney, Agent or Firm:
Yoshihiro Morimoto
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