Title:
DEVICE FOR DETECTING POSITION OF OBJECT HAVING CONDUCTIVE PATTERN, DETECTING METHOD, AND LASER BEAM MACHINING DEVICE
Document Type and Number:
Japanese Patent JP2003285180
Kind Code:
A
Abstract:
To provide a device for detecting a position in which position detection can be executed in a short time without surface chemical treatment for forming an opening on a metal layer coated on the surface of an object.
A stage 20 holds the object 21 and moves the object 21 in a two-dimensional direction parallel with one virtual plane. An eddy current sensor 7 is arranged opposingly to the object 21 held on the stage 20. A hole is formed on a surface layer part by making the laser beam incident on the object 21 held on the stage 20 by a laser beam optical system. An image observation device 9 detects the position of the object on the basis of a pattern formed on the surface of the object held on the stage.
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Inventors:
ISO KEIJI
Application Number:
JP2002084797A
Publication Date:
October 07, 2003
Filing Date:
March 26, 2002
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
G01B7/00; B23K26/02; B23K26/08; B23K26/382; G01B11/00; H05K3/00; H05K3/46; B23K101/42; (IPC1-7): B23K26/02; B23K26/00; B23K26/08; G01B7/00; G01B11/00; H05K3/00; H05K3/46
Attorney, Agent or Firm:
Keishiro Takahashi (1 person outside)