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Title:
DEVICE HAVING MICROLENS AND SHAPE OF MICROLENS
Document Type and Number:
Japanese Patent JPH09222505
Kind Code:
A
Abstract:

To inexpensively form microlenses as an optical system for condensing of a liquid crystal display panel used in a liquid crystal projector by a simple stage.

An aluminum film 21 is formed atop an upper substrate 2 provided with color filters, etc., on the rear surface and prescribed resist patterns 22 for forming light shielding films (black masks) 11 are formed thereon. When an anodic oxidation is executed next, the aluminum film 21 exposed via the apertures 23 of the resist patterns 22 are anodically oxidized and is changed to a transparent anodic oxide (Al2O3). In addition, the volume thereof is increased to a planoconvex shape by the anodic oxidation, by which the planoconvex microlenses 10 are formed. On the other hand, the aluminum film 21 under the resist patterns 22 is not anodically oxidized and the light shielding films 11 are formed by the aluminum film 12 which is not anodically oxidized. This method is applicable to two-dimensional image sensors, etc., as well.


Inventors:
OTANI TOMOHIKO
Application Number:
JP5257796A
Publication Date:
August 26, 1997
Filing Date:
February 16, 1996
Export Citation:
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Assignee:
CASIO COMPUTER CO LTD
International Classes:
G02F1/13; B29D11/00; G02B3/00; G02F1/1335; G02F1/13357; (IPC1-7): G02B3/00; G02F1/13; G02F1/1335
Attorney, Agent or Firm:
Jiro Sugimura



 
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