Title:
DEVICE FOR HOLDING OPTICAL ELEMENT AND EXPOSURE APPARATUS EQUIPPED WITH THE SAME
Document Type and Number:
Japanese Patent JP2008111891
Kind Code:
A
Abstract:
To provide a device for holding an optical element, which can exhibit high precision positioning accuracy even when a power source is restarted and to provide an exposure apparatus equipped with the device.
The device for holding the optical element has a driving mechanism 71 for driving a lens LE in an optical axis direction and a lens position detection means 72 for measuring the position of the lens LE. The lens position detection means 72 has an incremental type vertical displacement detection sensor 722 for measuring the relative position of the lens LE in the optical axis direction and an absolute type vertical displacement detection sensor 721 for measuring the absolute position of the lens LE.
Inventors:
ONUKI ICHIRO
KOBAYASHI KENICHI
YOSHIDA KENJI
OTA JUN
KOBAYASHI KENICHI
YOSHIDA KENJI
OTA JUN
Application Number:
JP2006293429A
Publication Date:
May 15, 2008
Filing Date:
October 30, 2006
Export Citation:
Assignee:
CANON KK
International Classes:
G02B7/02; G01B11/00; G02B7/08; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Ryosuke Fujimoto