Title:
DEVICE FOR INJECTING PLURAL MEDIA THROUGH PLURAL NOZZLES FOR MEDIA
Document Type and Number:
Japanese Patent JP2000343016
Kind Code:
A
Abstract:
To inject plural media from plural nozzles in order of time, to prevent dropping the media from the nozzles and to reduce mechanical or technical cost.
In this device 1, two or more media are injected from plural nozzles for median, each of which exists on each arm 10, 20 and 30 for medium. In such a case, the device 1 possesses a suspending device for each arm for medium and plural nozzles for media are separately rotated around the same axis line Z.
Inventors:
SUMNITSCH FRANZ
Application Number:
JP2000102011A
Publication Date:
December 12, 2000
Filing Date:
April 04, 2000
Export Citation:
Assignee:
SEZ SEMICONDUCTOR EQUIP ZUBEHO
International Classes:
B05B7/00; B05B15/10; B05B15/74; B05C5/00; B05C11/08; H01L21/027; H01L21/304; G03F7/16; G03F7/30; (IPC1-7): B05C5/00; H01L21/027; H01L21/304
Domestic Patent References:
| JPH06291027A | 1994-10-18 | |||
| JPH0831732A | 1996-02-02 | |||
| JPH1027735A | 1998-01-27 | |||
| JPH10118552A | 1998-05-12 | |||
| JPH09150092A | 1997-06-10 | |||
| JPH07283104A | 1995-10-27 | |||
| JPH08255745A | 1996-10-01 | |||
| JPH06210230A | 1994-08-02 | |||
| JPH1022248A | 1998-01-23 |
Attorney, Agent or Firm:
Takehiko Suzue (4 outside)