Title:
DEVICE FOR INSPECTING SEMICONDUCTOR
Document Type and Number:
Japanese Patent JPS5441078
Kind Code:
A
Inventors:
UBUKATA HIROHIKO
Application Number:
JP10807677A
Publication Date:
March 31, 1979
Filing Date:
September 08, 1977
Export Citation:
Assignee:
KOBATORON KK
International Classes:
H01L21/66; H01L21/68; H01L21/683; G01R31/26; (IPC1-7): G01R31/26; H01L21/66
Domestic Patent References:
| JPS49115665A | 1974-11-05 |