Title:
DEVICE FOR MEASURING DEPTH
Document Type and Number:
Japanese Patent JPH01140004
Kind Code:
A
Abstract:
PURPOSE:To accurately measure a deep groove without being affected by its pattern by a method wherein a beam splitter which radiates a measuring light to an object to be measured, a light intensity detector, a device for controlling a light path length, and a calculator which calculates the depth from the light intensity. CONSTITUTION:A monochromatic light emitted from a light source 14 is divided into a measuring light fa and a reference light sa by a beam splitter 16, and the measuring light fa is radiated to an object to be measured 12. An object light fb reflected by the object and the reference light sa are interfered, causing an interference light q to be detected by a light intensity detector 19. A light path length of the reference light sa is controlled by a device for controlling the light path length so that the intensity of only the object light fb from the object 12 of the interference light q is to be reduced. Thus the depth of a deep groove can be calculated from the light intensity detected by the photo intensity detector 19.
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Inventors:
TSUMURA AKIRA
Application Number:
JP29797087A
Publication Date:
June 01, 1989
Filing Date:
November 26, 1987
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
G01B11/22; (IPC1-7): G01B11/22
Attorney, Agent or Firm:
Takehiko Suzue (2 outside)