Title:
DEVICE AND METHOD FOR FORMING FILM, AND PROTECTIVE FILM
Document Type and Number:
Japanese Patent JP2004095452
Kind Code:
A
Abstract:
To provide a method and a device for forming a metal oxide film, and especially a protective film for a plasma display panel by forming a thin film for controlling and improving the property of a metal oxide.
This film formation method forms a thin film of carbon fluoride on a metal oxide-film surface for improving secondary-electron-emission efficiency of the thin film and improves the property of a protective film using a water repellent effect. The conductivity and the temperature characteristic of the protective layer of an alternated type plasma display panel are controlled for improving secondary-electron-emission efficiency to greatly improve the throughput of panel manufacture.
Inventors:
MIYAKE TATSUYA
KATO AKIRA
YAJIMA YUSUKE
KAJIYAMA HIROSHI
KATO AKIRA
YAJIMA YUSUKE
KAJIYAMA HIROSHI
Application Number:
JP2002257252A
Publication Date:
March 25, 2004
Filing Date:
September 03, 2002
Export Citation:
Assignee:
HITACHI LTD
International Classes:
C23C14/06; C23C16/30; H01J9/02; H01J11/22; H01J11/34; H01J11/40; (IPC1-7): H01J9/02; C23C14/06; C23C16/30; H01J11/02
Attorney, Agent or Firm:
Yasuo Sakuta