DEVICE AND METHOD FOR INSPECTING SURFACE CONDITION

Japanese Patent JP3575576

B2

PROBLEM TO BE SOLVED: To reduce shading by attaching an optical sensor or a detection optical system lens while rotated in the photodetecting direction by a specified angle against the direction of subscanning, and detecting scattered light of irradiating light from a light-flooding optical system with multiple detecting parts of the optical sensor.
SOLUTION: A foreign matter inspecting optical system 11 comprises a detecting optical system 15 and a light-flooding optical system 16, and an inspection area 3, on a wafer 1, having a specified width in subscanning direction, is irradiated with laser beam from the optical system 16. And the upper scattered light is received with the optical system 15 provided above an inspection table 12, for detection. The optical system 11 is fixed to an X direction roving mechanism 18 and shifted in X direction. The length of the inspection area 3 in the X direction is the width of a line in main scanning direction. The width of the inspection area 3 in the main scanning direction is, when a CCD sensor 154 is attached while inclining against the X axis direction (subscanning direction) by θ, provided with the width covering the area for imaging aver the entire range of photo-detecting length of the CCD sensor 154, containing even the inclination.

Tetsuya Watanabe
Yoshio Morishige
Hisato Nakamura

JP24882896A

October 13, 2004

August 30, 1996

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Hitachi High-Tech Electronic Engineering Co., Ltd.

G01N21/88; G01N21/94; G01N21/956; H01L21/66; (IPC1-7): G01N21/956; H01L21/66

JP2038951A
JP4263233A

Kajiyama Hiroshi
Fujio Yamamoto

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