DEVICE AND METHOD FOR INSPECTING SURFACE

Title:

DEVICE AND METHOD FOR INSPECTING SURFACE

Document Type and Number:

Japanese Patent JP2001242091

Kind Code:

A

Abstract:

To provide a method and a device for inspecting a surface of an object 106.

This method includes moving operation between the object and the device inspecting the surface of the object for irradiating the surface of the object with a light radiation. This radiation is carried out in different imaging areas 108, 110 of the object surface respectively, so that a characteristic of at least one of the respective radiations is different from that in the other imaging area. For producing image formation from the same surface area of the object by the different respective radiations, an image is formed from the imaging area, and image information of the same surface area obtained from the different imaging areas are compared and/or combined with each other for producing surface inspection information.

Inventors:

KERAENEN HEIMO
KARPPINEN MARTTI
JUNTUNEN PEKKA

Application Number:

JP2001001777A

Publication Date:

September 07, 2001

Filing Date:

January 09, 2001

Export Citation:

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Assignee:

THERMO RADIOMETRIE OY

International Classes:

G01B11/30; G01N21/27; G01N21/57; G01N21/89; G01N21/892; G06T1/00; G01B11/06; (IPC1-7): G01N21/892; G01B11/06; G01B11/30; G01N21/27; G01N21/57; G06T1/00

Attorney, Agent or Firm:

Masatake Shiga (7 outside)

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