Title:
DEVICE AND METHOD FOR MEASURING STAGE POSITION
Document Type and Number:
Japanese Patent JP3013837
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce errors due to the flickering light by caused by air in a optical path of a laser interference meter.
SOLUTION: Distance between each laser interference meter 11-14, which is provided opposite to each other on movable axes crossing each other on movable stages 3, 4, and the movable stages 3, 4 are measured by the two pairs of laser interference meters 11-14. Optical path length of the laser interference meter is practically shortened by selecting the measuring output having a shorter optical path in the measuring output in X, Y axes for measurement of stage position so as to improve the measuring accuracy.
Inventors:
Kazuki Yokota
Application Number:
JP11690798A
Publication Date:
February 28, 2000
Filing Date:
April 27, 1998
Export Citation:
Assignee:
NEC
International Classes:
G01B11/00; G03F7/20; G03F9/00; H01L21/027; H01L21/68; (IPC1-7): G01B11/00; H01L21/027; H01L21/68
Domestic Patent References:
| JP1092735A | ||||
| JP7198320A | ||||
| JP4254317A | ||||
| JP4172204A | ||||
| JP429003A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)