PURPOSE: To prevent the irregularity on a coating surface due to scattering of waste when performing coating by rotating an object to be coated.

CONSTITUTION: The device retains a sample 20 by a sample holder 21 and rotates the sample holder 21, thus properly dissipating a liquid coating agent and coating the surface of the sample 20 uniformly. Also, since the scattering of the surplus coating agent to the surrounding is prevented during rotation of the sample 20, the scattered coating agent is received by a scattering- prevention cover 22 and the coating agent waste is received by a pan 23. At least one detergent discharge port 24 for discharging a detergent is provided on the side surface of the sample holder 21 and the detergent is sprayed over the inner wall of a scattering prevention cover 22 and/or the inner entire surface of the pan 23, thus washing the scattering prevention cover 22 and the pan 23.