Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
DEVICE FOR TRANSPORTING AND METERING/DISPENSING FLUID EASILY DECOMPOSED
Document Type and Number:
Japanese Patent JPH06213344
Kind Code:
A
Abstract:

PURPOSE: To prevent chemicals from being mixed with the atmosphere, moisture or the other base substances by providing a break seal capable of being bored by a penetrator to a control valve device attached to a storage tank and for storing, supplying, metering and dispensing volatile chemicals.

CONSTITUTION: An inlet/outlet attaching part 12 is provided on a storage tank 10, and a valve adapter nut 24 is fitted to an extension part 14 with a flange 16 continuously mounted on it. A sealing gasket 22 is fastened to a metallic break seal 16 by screwing a lower valve body 28 of a valve assembly 26 to the nut 24. The valve assembly 26 is provided with an upper valve body 10 including a valve rod 42 and a valve rod operating unit having a shape of a handle 44, and a connecting flange 38 connectable to a vacuum device to be used in manufacturing a semiconductor is continuously mounted on the upper valve body 40. A penetrator 46 capable of boring the break seal 16 is fixed to the lower part of the valve rod 42, and the periphery of the valve rod 42 is surrounded with a bellows 48.


Inventors:
PIITAA TEII RANKE
JIEEMUSU KURITSUFUOODO MASHIYU
Application Number:
JP29603293A
Publication Date:
August 02, 1994
Filing Date:
November 01, 1993
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
AIR PROD & CHEM
International Classes:
F16K21/16; B65D47/24; F16K13/00; F16K25/04; F16K41/10; (IPC1-7): F16K21/16; F16K25/04
Domestic Patent References:
JP62503047Y
JPH0217117A1990-01-22
JP3107588B22000-11-13
Attorney, Agent or Firm:
Yoshihisa Oshida