Title:
DEVICE FOR TRANSPORTING LIQUID IN CONTAINER
Document Type and Number:
Japanese Patent JPS54134556
Kind Code:
A
Abstract:
In a crucible or reactor for making multi-layered semiconductor devices by means of liquid-phase epitaxy, different supersaturated solutions are brought into contact with semiconductor substrates for short times. Transport of the solutions occurs by alternating acceleration. Either gravity alternates with centrifugal force, or a positive rotational acceleration alternates with a negative one. Chambers within the reactor are interconnected by channels so that the alternating forces acting upon the solutions cause these to flow in a preferred direction without mixing with each other.
Inventors:
DEIITERU POORU
HANSUYORUGU SHIEEERU
HANSUYORUGU SHIEEERU
Application Number:
JP3713779A
Publication Date:
October 19, 1979
Filing Date:
March 30, 1979
Export Citation:
Assignee:
IBM
International Classes:
B67D7/78; C30B19/00; C30B19/06; H01L33/00; C30B29/40; H01L21/208; H01L33/30; (IPC1-7): B01J17/06; B67D5/60; H01L21/208
Other References:
JAPAN JOURNAL OF APPLIED PHYSICS#V16=1977