PURPOSE: To move a semiconductor substrate to an inspection position not manually to enable its rear side to be inspected by providing a carrier body, a semiconductor substrate and a substrate holder.

CONSTITUTION: A semiconductor substrate 1 sent out from a substrate storing box 3a to a substrate transfer part 4a by a carrier belt 2 is supported at the end opposite to the substrate by substrate holders 9, 9 protruding from carrier bodies 8, 8 which move interlockingly along guide rails 7, 7. Then, the carrier bodies 8, 8 move to an inspection part 5 and stops there to have the substrate 1 to be visually inspected. The holders 9, 9 are freely swingable with respect to the axis as the center inside the carrier bodies 8, 8, and one of them is swung by a motor 6. When the rear side of the substrate 1 is to be inspected, with the motor 6 driven, as the holders 9, 9 hold the end opposite to the substrate 1, the substrate 1 is swung by 180° due to interlocking operation to enable the rear side to be visually inspected. After visual inspection, the carrier bodies are moved to a substrate transfer part 4b and the substrate 1 is housed in a substrate housing box 3b.