Title:
デバイス、デバイス製造方法、粒径測定方法、耐性観察方法、化学的反応方法、粒子保存方法、及び自動観察装置
Document Type and Number:
Japanese Patent JP6646301
Kind Code:
B2
Abstract:
An observation apparatus (100) includes an observing optical system (101) capable of obtaining an image of a measurement target present in a gap included in a device (1). One end of the gap included in the device (1) is wider than the other end thereof, and upon light beam irradiation to the device (1), an interference fringe appears in the gap. The observing optical system (101) irradiates the gap included in the device (1) with a plurality of light beams having different wavelengths to cause a plurality of interference fringes to appear in the gap. Then the observing optical system (101) obtains an image of the plurality of interference fringes.
Inventors:
Makoto Kono
Hitoshi Watanabe
Wataru Ota
Hitoshi Watanabe
Wataru Ota
Application Number:
JP2017196720A
Publication Date:
February 14, 2020
Filing Date:
October 10, 2017
Export Citation:
Assignee:
National University Corporation Osaka University
International Classes:
G01N1/28; B01D43/00; G01N15/02; G01N21/01
Domestic Patent References:
| JP2013190423A | ||||
| JP2003332047A | ||||
| JP2010540959A | ||||
| JP2013253875A | ||||
| JP2012071464A |
Foreign References:
| WO2006137448A1 | ||||
| US20080187011 |
Attorney, Agent or Firm:
Hiroyuki Maei