Title:
半導体基板の表面において電気化学反応を実施するためのデバイスおよび方法
Document Type and Number:
Japanese Patent JP5791590
Kind Code:
B2
Abstract:
The invention concerns a device to conduct an electrochemical reaction on the surface of a semiconductor substrate (S), characterized in that the device comprises: a container (10) intended to contain an electrolyte (E), a support (20) arranged in the container, said support being adapted for attachment of the semiconductor substrate (S) on said support (20), a counter-electrode (30) arranged in the container (10), illumination means (50) comprising a source (51) emitting light rays and means (52) to homogenize the light rays on all of said surface of the semiconductor substrate (S), so as to activate the surface of the semiconductor substrate (S), and an electric supply (40) comprising connection means for connection to the semiconductor substrate and to the counter-electrode in order to polarize said surface of said semiconductor substrate (S) at an electric potential permitting the electrochemical reaction. The invention also concerns the method to conduct an electrochemical reaction on a surface of a corresponding semiconductor substrate.
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Inventors:
Said Zafrawi
Francis Deschool
Frederik Reynal
Francis Deschool
Frederik Reynal
Application Number:
JP2012501312A
Publication Date:
October 07, 2015
Filing Date:
March 25, 2010
Export Citation:
Assignee:
ALCHIMER
International Classes:
C25D9/02; C25D7/12
Domestic Patent References:
| JP2007297714A | ||||
| JP60189931A | ||||
| JP57089495A | ||||
| JP2008057035A |
Foreign References:
| US20080003781 | ||||
| WO2009037311A1 | ||||
| US20040262150 |
Attorney, Agent or Firm:
Yasuhiko Murayama
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro