Title:
逆流ガス計器近接センサを実現する装置および方法、並びにリソグラフィシステム
Document Type and Number:
Japanese Patent JP4913855
Kind Code:
B2
Abstract:
A gas gauge proximity sensor supplying gas in a reverse flow direction from the injection chamber to the measurement chamber. Supplying gas in a reverse flow direction enables the transient behavior in the sensor to more rapidly stabilize, with a resulting increase in bandwidth. Optionally, a scavenger chamber can be used to remove the excess gas by locating a scavenger aperture of the scavenger chamber in close proximity to the exit aperture of the injection chamber. A bridge proximity sensor can be used with a reference chamber to receive gas flow from a location close to the exit aperture of the injection chamber in order to reduce common mode errors.
Inventors:
Ryans, Joseph H.
Application Number:
JP2009247191A
Publication Date:
April 11, 2012
Filing Date:
October 28, 2009
Export Citation:
Assignee:
AS ML Holding N.V.
International Classes:
G01B13/12; G03F7/20; H01L21/027
Domestic Patent References:
| JP54010949Y1 | ||||
| JP3072210A | ||||
| JP6120327A | ||||
| JP10062147A | ||||
| JP2005338074A | ||||
| JP2007218901A |
Foreign References:
| US3194055 | ||||
| US4550592 | ||||
| SU1714230A | ||||
| SU1717868A | ||||
| US4953388 | ||||
| EP0538771A1 | ||||
| US5298073 | ||||
| DE20004783U | ||||
| US6029502 | ||||
| US6643946 | ||||
| DE102004053672A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki