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Title:
DIAMOND-CONTAINING MATERIAL IN MICROELECTRONICS
Document Type and Number:
Japanese Patent JP2008252107
Kind Code:
A
Abstract:

To provide a field emission element containing a thermally conductive film of integrated circuit package, a low-k dielectric layer of integrated circuit multilevel wiring, a heat conductive adhesion film, a heat conductive film of thermoelectric cooling element, a passivation film for integrated circuit elements (ICs) and a field-emission cathode.

A diamondoid includes a low-class diamondoid, a recently provided high class diamondoid, and substituted and non-substituted diamondoid. The diamondoid containing material may be processed as a polymer containing diamondoid, a sintered ceramics containing diamondoid, a diamondoid-ceramic complex, a CVD diamondoid film, a self-assembled diamondoid film, and a diamondoid-fullerene complex. The system paves the way for new applications of the diamondoid containing material in microelectronics.


Inventors:
DAHL JEREMY E
CARLSON ROBERT M
LIU SHENGGAO
Application Number:
JP2008121457A
Publication Date:
October 16, 2008
Filing Date:
May 07, 2008
Export Citation:
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Assignee:
CHEVRON USA INC
International Classes:
H01L23/36; H01L23/373; C07C4/00; C07C7/04; C07C7/12; C07C7/135; C07C13/64; C07C17/10; C07C17/16; C07C17/383; C07C17/395; C07C23/20; C07C47/347; C07C49/423; C07C205/05; C08G61/00; C08G61/02; C08G83/00; C08L65/00; H01L21/768; H01L23/522; H01L35/30
Attorney, Agent or Firm:
Hideto Asamura
Hajime Asamura
Katsunori Ando
Yukihiro Ikeda