Title:
ダイヤモンド単結晶基板
Document Type and Number:
Japanese Patent JP5418621
Kind Code:
B2
Inventors:
Takahiro Imai
Kiichi Meguro
Kiichi Meguro
Application Number:
JP2012031347A
Publication Date:
February 19, 2014
Filing Date:
February 16, 2012
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
C30B29/04
Domestic Patent References:
| JP7277890A | ||||
| JP7048198A | ||||
| JP3075298A | ||||
| JP2005508279A |
Attorney, Agent or Firm:
Masami Sakai
Norio Kagami
Norio Kagami