Title:
DICING DEVICE
Document Type and Number:
Japanese Patent JP2017168762
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a dicing device that hinders dispersion of iron-powder-containing mist that occurs during processing of a work, thereby collecting iron powder contained in iron-powder-containing mist.SOLUTION: A magnetic material 90 is disposed in the duct cover. The magnetic material 90 comprises: a long rod-like magnetic material body the longitudinal axis of which is disposed along the axis of a duct hose; and a conical rectifying member 94 provided on the leading-end side of the magnetic material body and on the leading-end side opposite a blade. The magnetic material 90 is composed of three magnet groups 96, 98, 100 arranged in connection such that the intervals between magnetic poles increase from the leading-end side opposite to the blade toward the trailing-end side.SELECTED DRAWING: Figure 5
Inventors:
ARAI YUSUKE
Application Number:
JP2016054743A
Publication Date:
September 21, 2017
Filing Date:
March 18, 2016
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
H01L21/301; B24B27/06; B24B55/12
Attorney, Agent or Firm:
Kenzo Matsuura