Title:
DICING MACHINE
Document Type and Number:
Japanese Patent JP3811945
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a dicing machine capable of greatly improving dicing efficiency by aligning a plurality of mounted workpieces for them to be processed in a single operation with the operation not made complicate or damage inflicted on the workpieces.
SOLUTION: In the processing unit, work tables 28, 28 for suctioning and retaining workpieces W are rotatably arranged on a θ-table 30. The tables 28, 28 are rotated for the X-direction streets 60 to be parallel to each other for workpieces W1, W2, and then the θ-table 30 is rotated for the X-direction streets 60 for the workpieces W1, W2 to be parallel to the cutter travelling direction (X-direction) of a rotary blade 50. The X-direction streets 60 for the workpieces W1, W2 are cut during the X-direction travelling of the X-table. Since the X-direction streets 60 for the workpieces W1, W2 are on the same straight line, the workpiece W2 may be cut upon completion of the cutting of the workpiece W1.
Inventors:
Kazuya Fukuoka
Yasuyuki Sakatani
Noriaki Ebisu
Takayuki Asano
Yasuyuki Sakatani
Noriaki Ebisu
Takayuki Asano
Application Number:
JP2001378627A
Publication Date:
August 23, 2006
Filing Date:
December 12, 2001
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
H01L21/301; (IPC1-7): H01L21/301
Domestic Patent References:
| JP55034426A | ||||
| JP8037168A | ||||
| JP2001239439A | ||||
| JP4363047A |
Attorney, Agent or Firm:
Kenzo Matsuura