Title:
金属銅析出のための前駆物質としてのシュウ酸二銅(I)錯体
Document Type and Number:
Japanese Patent JP4630272
Kind Code:
B2
Abstract:
The invention relates to dicopper(I) oxalate complexes stabilized by neutral Lewis bases, such as alkenes or alkynes, and to the use of dicopper(I) oxalate complexes as precursors for the deposition of metallic copper, in which the neutral Lewis bases used are alkynes, alkenes, triarylphosphines, CO or isonitriles.
Inventors:
Katrin Koehler
Application Number:
JP2006504900A
Publication Date:
February 09, 2011
Filing Date:
March 29, 2004
Export Citation:
Assignee:
BASF SE
International Classes:
C07C55/07; C07C13/42; C07C51/41; C07F1/08; C23C16/18; H05K3/10
Domestic Patent References:
| JP2005530827A | ||||
| JP6501287A | ||||
| JP4318170A | ||||
| JP2002522453A | ||||
| JP2002542397A | ||||
| JP2000212742A | ||||
| JP2001140075A |
Foreign References:
| US4387055 |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel