Title:
誘電体素子
Document Type and Number:
Japanese Patent JP6766702
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a dielectric device including a dielectric film shaped like a thin film reduced in thickness, and having a high relative dielectric constant and an adequate leak current characteristic.SOLUTION: A dielectric device comprises a first electrode, a dielectric film and a second electrode. The dielectric film has: a first dielectric film formed on the first electrode; and a second dielectric film formed on at least the first dielectric film. The first dielectric film contains a barium bititanate (BaTiO) as a primary component. The first dielectric film includes a microcrystallite of 20 nm or less in average particle diameter. The second dielectric film contains, as a primary component, a composite oxide in which metal elements in a barium titanate (BaTiO) are partially substituted with tin, and a substitution site of the tin is mainly a Ba site. Supposing that the first dielectric film has a thickness T1, and the dielectric film has a thickness T2, the thicknesses T1 and T2 satisfy the relation given by 0.005≤T1/T2≤0.250, and the thickness T1 is 2 nm or more.SELECTED DRAWING: Figure 1
Inventors:
Takahashi Kazuko
Shiro Otsuki
Shota Suzuki
Junichi Kimura
Junpei Morishita
Shiro Otsuki
Shota Suzuki
Junichi Kimura
Junpei Morishita
Application Number:
JP2017045493A
Publication Date:
October 14, 2020
Filing Date:
March 09, 2017
Export Citation:
Assignee:
tdk Corporation
International Classes:
H01G4/33; C01G23/00; C04B35/468; H01G4/30
Domestic Patent References:
| JP8096957A | ||||
| JP2017119607A |
Foreign References:
| WO2005075377A1 | ||||
| US20020009577 |
Attorney, Agent or Firm:
Maeda/Suzuki International Patent Corporation