誘電体膜キャパシタおよびその製造方法

Title:

誘電体膜キャパシタおよびその製造方法

Document Type and Number:

Japanese Patent JP4852744

Kind Code:

B2

Abstract:

To provide an electrode mechanism in a dielectric material film capacitor which assures close contact between a lower electrode and a layer under the lower electrode and is not easily oxidized and thermally stable.

The dielectric material film capacitor 20 comprises a lower electrode 22 in the thickness of 10 to 100 nm formed of a material including platinum, a dielectric material film 24 formed on the upper part of the lower electrode 22 and including an oxide having the type ABOx peroviskite structure, and an upper electrode 26 provided on the upper part of the dielectric material film 24.

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Inventors:

Tomotaka Shinoda
Kinji Yamada
Takahiro Kitano
Yoshiki Yamanishi
Muneo Harada
Tatsuzo Kawaguchi
Yoshihiro Hirota
Katsuya Okumura

Application Number:

JP2005242473A

Publication Date:

January 11, 2012

Filing Date:

August 24, 2005

Export Citation:

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Assignee:

JSR CORPORATION
Octec Inc.

International Classes:

H01L27/105; H01G4/12; H01G4/33; H01L21/8246

Domestic Patent References:

JP2005116619A
JP2004349394A
JP11142201A
JP8264719A

Attorney, Agent or Firm:

Mitsue Obuchi
Yukio Fuse
Inoue Ichi

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