Title:
誘電体薄膜の製造方法及び製造装置
Document Type and Number:
Japanese Patent JP4480336
Kind Code:
B2
Inventors:
Toshihiro Suzuki
Noriaki Tani
Noriaki Tani
Application Number:
JP2003059705A
Publication Date:
June 16, 2010
Filing Date:
March 06, 2003
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/34; C23C14/10; H01B19/00
Domestic Patent References:
| JP2001011605A | ||||
| JP2003013212A | ||||
| JP6017248A | ||||
| JP11029862A | ||||
| JP6291375A | ||||
| JP2000038663A | ||||
| JP2001507756A | ||||
| JP3162571A |
Attorney, Agent or Firm:
Seiryu Corporation