Title:
二層振動膜を有する差動コンデンサ型マイク
Document Type and Number:
Japanese Patent JP6870150
Kind Code:
B2
Abstract:
A dual-diaphragm differential capacitive microphone includes: a back plate, a first diaphragm, and a second diaphragm. The first diaphragm is insulatively supported on a first surface of the back plate, where the back plate and the first diaphragm form a first variable capacitor. The second diaphragm is insulatively supported on a second surface of the back plate, where the back plate and the second diaphragm form a second variable capacitor. The back plate is provided with at least one connecting hole. The second diaphragm is provided with a recess portion recessed towards the back plate, where the recess portion passes through the connecting hole and is connected to the first diaphragm. The dual-diaphragm differential capacitive microphone achieves a higher signal-to-noise ratio.
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Inventors:
孫 ▲かい▼
Ene Ran
Hu Wei
Lee Go
Ene Ran
Hu Wei
Lee Go
Application Number:
JP2020509431A
Publication Date:
May 12, 2021
Filing Date:
June 27, 2018
Export Citation:
Assignee:
MEMSENSING MICROSYSTEMS (SUZHOU,CHINA) CO.,LTD.
International Classes:
H04R19/04
Domestic Patent References:
| JP2008005439A | ||||
| JP2010103637A | ||||
| JP2008259061A | ||||
| JP2008252854A | ||||
| JP2007067483A |
Foreign References:
| US20140239352 | ||||
| US20150189444 |
Attorney, Agent or Firm:
try international patent corporation