Title:
荷電粒子結晶学用回折計
Document Type and Number:
Japanese Patent JP7257549
Kind Code:
B2
Abstract:
The present invention relates to a diffractometer for charged-particle crystallography of a crystalline sample, in particular for electron crystallography of a crystalline sample. The diffractometer comprises a charged-particle source for generating a charged-particle beam along a charged-particle beam axis, a charged-particle-optical system for manipulating the charged-particle beam such as to irradiate the sample with the charged-particle beam and a charged-particle detection system at least for collecting a diffraction pattern of the sample based on the beam of charged-particles transmitted through the sample. The diffractometer further comprises a sample holder for holding the sample and a manipulator operatively coupled to the sample holder for positioning the sample relative to the beam axis. The manipulator comprises a rotation stage for tilting the sample holder with respect to the incident charged-particle beam around a tilt axis, and a multi-axes translation stage for moving the sample holder at least in a plane perpendicular to the tilt axis. The multi-axes translation stage is operatively coupled between the sample holder and the rotation stage such that the multi-axes translation stage is in a rotational system of the rotation stage and the sample holder is in a moving system of the multi-axes translation stage.
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Inventors:
Steinfeld, Gunther
Santiso-Kinones, Gastavo
Hovestrite, Eric
Santiso-Kinones, Gastavo
Hovestrite, Eric
Application Number:
JP2021569073A
Publication Date:
April 13, 2023
Filing Date:
May 19, 2020
Export Citation:
Assignee:
Eldico Scientific AG
International Classes:
H01J37/20; G01N23/20; H01J37/26
Domestic Patent References:
| JP2012013703A | ||||
| JP2011514641A | ||||
| JP53132258U | ||||
| JP60085056U | ||||
| JP2018129163A | ||||
| JP8106873A | ||||
| JP2168547A | ||||
| JP7012763A | ||||
| JP2009152120A |
Foreign References:
| WO2011033097A1 | ||||
| US20120001068 | ||||
| US20110253905 |
Attorney, Agent or Firm:
Takashima Hajime
Mitsuyoshi Kamada
Kyoko Doi
Yaeko Tamura
Hirofumi Taima
Atsuko Akai
Tomiya Tosaki
Dai Kitawaki
Mitsuyoshi Kamada
Kyoko Doi
Yaeko Tamura
Hirofumi Taima
Atsuko Akai
Tomiya Tosaki
Dai Kitawaki
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