Title:
希薄薬液製造装置
Document Type and Number:
Japanese Patent JP6835126
Kind Code:
B2
Abstract:
Dilute chemical solution production device has a plunger pump and a chemical solution supply pipe that supply a chemical solution from a chemical solution reservoir. The end of the chemical solution supply pipe serves as an injection point for the chemical solution. The chemical solution supply pipe is inserted to an approximately central position in the radial direction of an ultrapure water passage, which is a first pipe, via a bore-through joint. Conductivity meter as a conductivity measuring means is provided on the downstream side of the bore-through joint, which serves as the injection point, and is connected to the previously described control means so that the plunger pump can be controlled in accordance with the measured value of the conductivity meter. The dilute chemical solution production device is capable of producing, with a simple structure, a dilute chemical solution having an extremely low concentration of acid/alkali or the like.
Inventors:
Ko Sugita
Yuichi Ogawa
Yuichi Ogawa
Application Number:
JP2019063574A
Publication Date:
February 24, 2021
Filing Date:
March 28, 2019
Export Citation:
Assignee:
Kurita Water Industries Ltd.
International Classes:
B01F3/08; B01F1/00; B01F5/00; B01F15/04; B01J4/02; H01L21/304
Domestic Patent References:
| JP2000265945A | ||||
| JP59218731A | ||||
| JP2019107601A |
Foreign References:
| WO2016042933A1 | ||||
| WO2018225278A1 | ||||
| WO2018116987A1 |
Attorney, Agent or Firm:
Yuji Hayakawa
Keisuke Murasame
Keisuke Murasame