Title:
DILUTING METHOD OF ACID OR ALKALI ORIGINAL LIQUID AND DILUTING DEVICE
Document Type and Number:
Japanese Patent JP3741811
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To high accurately and efficiently dilute an acid or alkali original liquid by mixing a prescribed quantity of the original liquid with a pure water to prepare a mixed liquid different from a desired concentration, calculating the short quantity of the original liquid or the pure water by the difference between the measured concentration and the desired concentration and supplying the pure water to the mixed liquid.
SOLUTION: When a developer is prepared, the pure water from a pure water supply device A2 and the developing original liquid from an original liquid supply device A1 are supplied to a preparation vessel 2 and successively the developer is mixed in the preparation vessel 2 with a circulating and discharging device A3. At this time, a part of the developer is analyzed in the concentration by a concentration measuring device 3 and the resultant value of concentration is inputted to a control device. When the concentration of the developer is judged to be higher than the threshold value of the desired concentration compared to the threshold value of the previously setted desired concentration, the short quantity of the pure water and the quantity equivalent to 85-99% of the short quantity are calculated based on the difference between the measured value of the concentration and the desired value of the concentration and the quantity equivalent to 85-99% of the short quantity of the pure water is additionally supplied from the pure water supply device A2.
Inventors:
Norihiro Takasaki
Masafumi Nakamura
Toshiharu Ikuta
Masafumi Nakamura
Toshiharu Ikuta
Application Number:
JP35614796A
Publication Date:
February 01, 2006
Filing Date:
December 25, 1996
Export Citation:
Assignee:
Mitsubishi Chemical Engineering Co., Ltd.
International Classes:
B01F3/08; B01F15/04; G05D11/13; (IPC1-7): B01F15/04; B01F3/08
Domestic Patent References:
| JP9033538A | ||||
| JP47002050A | ||||
| JP7024289A | ||||
| JP5216241A | ||||
| JP3047522A |
Attorney, Agent or Firm:
Kazuhiko Okada