PURPOSE: To make a highly accurate form machining by measuring the distribution of optical strength by passing light through a measuring ferrule provided with optical fiber and a wave guide and obtaining a positionally related dimensions between the centers of a guide groove and the wave guide.
CONSTITUTION: Multiple wave guide chips 1a are arranged in a wafer optical axis direction (X-axis direction), and a continuous optical wave guide 1d is provided between wafer connecting end faces 1b and 1c exposed in that direction. Also a substrate wafer 1 in which the optical wave guide 1d is formed is fixed to the machining table 3a of a precision grinding machine at a specified position. A measuring ferrule 6 provided with an optical fiber 7 inside it is installed fixedly to a guide groove 2 so that an end 6a roughly coincides with the end face 1c of a wave guide substrate. Then, a ferrule 11 for optical transmission is set against the optical wave guide 1d measured by moving a two-axis fine moving stage 10 so as to receive outgoing beam. While coordinate values are monitored by a power meter 15, the stage 10 is driven, they are read at the most intensive optical transmission strength with a stage scale 13.
SHIGEMATSU TAKASHI
ABE FUMIHIKO
YANAGAWA HISAHARU
TOMITA NOBUO
NIPPON TELEGRAPH & TELEPHONE