Title:
DIMETHYL GOLD PHOSPHONIUM COMPLEX FOR LASER CVD
Document Type and Number:
Japanese Patent JP2606066
Kind Code:
B2
Abstract:
PURPOSE: To make the improved photodissociation characteristic exhibit and to enable the enhancement of the pattern accuracy by forming dimethyl{methanidobis(dimethylphosphonium methylido)}gold into a gold film by the Chemical Vapor Deposition process.
CONSTITUTION: A silicon substrate is introduced into a vacuum container having a quartz window and a heating means and Ar as a gaseous carrier is introduced into a reaction container at a flow rate of 10 sccm with dimethyl{methanidobis(dimethylphosphonium methylido)}gold (III) held under a reduced pressure of 2 Torr at a vaporization temperature of 80 to 120°C. An excimer light beam irradiates perpendicularly the substrate at a repetitive number of 20Hz from the quartz window for 30 minutes while the substrate is kept at 100°C. A complex is thus photodissociated and the metallic film with Au content of 97 to 98wt.% is precipitated on the substrate.
Inventors:
Hiroto Uchida
Saito memoir
Masamitsu Sato
Masayuki
Ogumi Katsumi
Saito memoir
Masamitsu Sato
Masayuki
Ogumi Katsumi
Application Number:
JP33778092A
Publication Date:
April 30, 1997
Filing Date:
November 26, 1992
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
C23C16/18; C07F9/6596; C23C16/48; H01B1/02; H01B13/00; H01L21/285; (IPC1-7): C23C16/18; C07F9/6596; C23C16/48
Domestic Patent References:
| JP6411975A |
Other References:
【文献】西独国特許出願公開2702326(DE,A)
Attorney, Agent or Firm:
Shoichi Hirose (1 person outside)
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