PURPOSE: To stabilize insulating effect and eliminate fluctuation of sensor characteristics, by using members of excellent thermal conductivity as respective joining member for joining a substrate with a film resistance with a holding member through a thermal insulating member.
CONSTITUTION: A substrate 6 with a film resistance is jointed with a thermal insulating member 12 through a joining member 13, and a direct-heating flow- rate sensor is formed by jointing this thermal insulating member 12 with a holding member 5 by a joining member 14. On this occasion a member of excellent thermal conductivity is used for each of joining members 13 and 14. By this arrangement, as thermal insulating effect is determined only by the thermal insulating member 12, it can be stabilized without causing fluctuations in such characteristics as response, dynamic range, etc. of the sensor.
ONODA MASATOSHI
MIURA KAZUHIKO
FUJINO SEIJI
HATTORI TADASHI
