Title:
ディスク状要素のハンドリング装置
Document Type and Number:
Japanese Patent JP4451805
Kind Code:
B2
Abstract:
The invention is an apparatus for handling of a disklike member especially for handling of a wafer (8), comprising robot means (2,3) adapted to carry out at least an angular motion in a defined moving plane, and end-effector means (6) for holding the disklike member (8), wherein said apparatus comprises a wrist member (4) operatively interconnecting said robot means (2,3) with said end-effect or means (6); wherein said wrist member (4) and said robot (2,3) provide an inclining motion of said disklike member (8) by a combined movement of said end-effector (6) about a first axis in plane with and symmetrically dividing said surface, and about a second axis perpendicular to said moving plane.
Inventors:
Ralph Tillman
Application Number:
JP2005111442A
Publication Date:
April 14, 2010
Filing Date:
April 07, 2005
Export Citation:
Assignee:
Integrated Dynamics Engineering GmbH
International Classes:
B65G49/07; H01L21/677; B25J9/00; G01N21/88; G01N21/95; H01L21/66; H01L21/68
Domestic Patent References:
| JP5055342A | ||||
| JP10012697A | ||||
| JP63013689U | ||||
| JP2001096480A | ||||
| JP2000028538A | ||||
| JP2004503769A | ||||
| JP11160244A | ||||
| JP5064760U |
Attorney, Agent or Firm:
Masao Okabe
Nobuaki Kato
Kazuo
Okabe
Shinichi Usui
Takao Ochi
Teruhisa Motomiya
Seiichiro Takahashi
Koji Yoshizawa
Takao Matsui
Kiyohiko Susumu
Nobuaki Kato
Kazuo
Okabe
Shinichi Usui
Takao Ochi
Teruhisa Motomiya
Seiichiro Takahashi
Koji Yoshizawa
Takao Matsui
Kiyohiko Susumu