Title:
放電ランプ、光源装置、露光装置、及び露光装置の製造方法
Document Type and Number:
Japanese Patent JP5055632
Kind Code:
B2
Abstract:
A light source apparatus wherein it is possible, for example, to mount a discharge lamp to a mounting mechanism easily in a short amount of time, is provided. A light source apparatus is equipped with a discharge lamp (1), which has a glass tube (25) that forms a light emitting part and a base member (26) that is coupled thereto, and a mounting apparatus (31) that holds the discharge lamp (1) via the base member (26). Therein, the base member (26) has a flange part (26a) that contacts positioning plate (50) of the mounting apparatus (31), and a fixed part (26h) that is urged with a pressing force that presses the flange part (26a) to the positioning plate (50). Furthermore, the mounting apparatus (31) has a fixing arm (5 5A) that urges the fixed part (26h) by a compression coil spring (44A).
Inventors:
White number Hiro
Yasuo Aoki
Motoo Koyama
Takayuki Kikuchi
Yasuo Aoki
Motoo Koyama
Takayuki Kikuchi
Application Number:
JP2008532127A
Publication Date:
October 24, 2012
Filing Date:
August 30, 2007
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01J5/50; F21V29/02; H01J7/24; H01L21/027; F21Y101/00
Domestic Patent References:
| JPH1055713A | 1998-02-24 | |||
| JPH11283898A | 1999-10-15 | |||
| JP2001216938A | 2001-08-10 | |||
| JPH0528968A | 1993-02-05 | |||
| JPH09213129A | 1997-08-15 | |||
| JP2000181075A | 2000-06-30 | |||
| JP2003045219A | 2003-02-14 | |||
| JP2003059454A | 2003-02-28 | |||
| JP2002373626A | 2002-12-26 | |||
| JP2003297228A | 2003-10-17 |
Foreign References:
| US2520262A | 1950-08-29 | |||
| US6692309B1 | 2004-02-17 | |||
| US5465025A | 1995-11-07 |
Attorney, Agent or Firm:
Satoshi Omori