PURPOSE: To constitute the titled device so that a stamper disk does not deform even if the stamper disk is fixed firmly and strong negative pressure is applied to the same by so constituting the stamper that the negative pressure acts upon the stamper disk by dispersing the negative pressure through a large number of fine holes of a porous metal, by a method wherein the porous metal is fitted in a vacuum hole provided on a stamper disk holding table to fix the stamper disk and the surface of the porous metal is formed flush with that of the stamper disk holding table.

CONSTITUTION: Vacuum holes 5 are provided at six places by penetrating through a stamper disk holding table 3 and a collar part 10 of a guide cylinder 7, into the upper part of which a porous metal 4 is fitted, and the lower part of the same is connected with a hose 6 from a vacuum generator 22. The porous metal 4 is a porous sintered member of a stainless alloy and possesses a large number of fine continuous holes, the surface of which is formed flush with that of a stamper holding table 3, and a stamper disk 1 is prevented from deforming.