Title:
ディスク型処理装置
Document Type and Number:
Japanese Patent JP5173268
Kind Code:
B2
Inventors:
Kensuke Ando
Eiichi Miura
Eiichi Miura
Application Number:
JP2007149325A
Publication Date:
April 03, 2013
Filing Date:
June 05, 2007
Export Citation:
Assignee:
Mitsubishi Materials Techno Co., Ltd.
International Classes:
F26B25/04; F26B17/20; F26B23/10
Domestic Patent References:
| JP61272581A | ||||
| JP4173207A | ||||
| JP2004190915A | ||||
| JP60118491U | ||||
| JP2002306941A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Yasuhiko Murayama
Noriko Yanai
Tadashi Takahashi
Masakazu Aoyama
Yasuhiko Murayama
Noriko Yanai