PURPOSE: To provide a dispenser capable of applying liquid on a semiconductor substrate stably without causing ununiformity in thickness of an applied film and without contaminating the substrate by providing altogether in a single block body a nozzle for dropping liquid to be applied, and discharge ports for supplying a solvent for the liquid and for supplying air both for cleaning the nozzle, these components being provided integrally so as to communicate with a solvent reservoir within the block body.

CONSTITUTION: A dispenser body is formed into a block 9 having a nozzle 3. Small- diameter holes 20 are opened through the opposite sides of the nozzle 3, and a solvent supplying tube 5 and an air supplying tube 19 are attached to both ends of each of these holes, respectively. Further, a hole having a larger diameter than the holes 20 is formed on the face of the block 9 orthogonal to the faces having these tubes 5, 19, and one end of the hole defines a solvent discharging port 6 while the other end is connected with a silica liquid supplying tube 4. A discharge pipe 21 for dropping silica liquid is inserted into the solvent discharging port 6 such that one end of the discharge pipe 21 communicates with a hole of a coupling 7b of the silica liquid supplying tube 4 and a discharge port 1 for dropping the silica solution is placed slightly back from the solvent discharging port 1.