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Title:
DISPLACEMENT DETECTING APPARATUS AND PROCESSING SYSTEM USING THE SAME
Document Type and Number:
Japanese Patent JP2008311303
Kind Code:
A
Abstract:

To provide a displacement detecting apparatus capable of detecting easily the displacement of a workpiece with a simple structure without lowering the throughput by providing an edge detecting means in some arm parts connected in series to each other.

A plurality of arm parts are connected in series rotatably and this displacement detecting apparatus for the workpiece is provided in a conveying mechanism for conveying the workpiece by retaining the workpiece with a most distal arm part. This displacement detecting apparatus is constituted to comprise: an edge detecting means for detecting an edge of the workpiece retained at least with the most distal arm part which are provided in arm parts other than the most distal arm part among the plurality of arm parts; and a displacement detecting part for measuring the displacement of the workpiece based on the detected value by the edge detecting means. Thus, with a simple structure, the displacement of the workpiece can be easily detected without lowering the throughput.


Inventors:
KONDO KEISUKE
Application Number:
JP2007155506A
Publication Date:
December 25, 2008
Filing Date:
June 12, 2007
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/677; G05B19/404
Domestic Patent References:
JPH09115991A1997-05-02
JPH10335410A1998-12-18
JP2003179119A2003-06-27
JP2006351883A2006-12-28
JPH1191948A1999-04-06
JPS6457104A1989-03-03
JPS6394653A1988-04-25
JP2007095881A2007-04-12
JP2002319612A2002-10-31
JP2000012657A2000-01-14
Foreign References:
WO2005004227A12005-01-13
Attorney, Agent or Firm:
Akihiro Asai