Title:
Displacement detecting device
Document Type and Number:
Japanese Patent JP6029349
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To correctly obtain displacement information without being affected by surface roughness, stain, the attachment of fine dust, etc. on a measured surface and the inclination of the measured surface concerning a non-contact optical displacement detection device.SOLUTION: Irradiation light for measuring a displacement amount is reflected against a measured surface TG. A light reception part 8 receives the light amount of detection light for measuring a displacement amount. A deviation amount of light reception balance by the shift of a beam position on the light reception part 8 due to the inclination of a measured surface TG is calculated based on the light amount of detection light detected by the light reception part 8. A calculation processing unit 20 generates a focus error signal Sthat is obtained by correcting the influence of inclination of a measured surface TG on the basis of a calculated deviation amount. A focus control unit 30 operates a focus servo through the use of a focus error signal Sgenerated by the calculation processing unit 20 to thereby allow the value of a focus error signal Sto be zero when the focus of irradiation light condensed by an objective lens 5 is positioned on the front side or depth side of a measured surface TG.
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Inventors:
Daisuke Oguri
Application Number:
JP2012143409A
Publication Date:
November 24, 2016
Filing Date:
June 26, 2012
Export Citation:
Assignee:
dmg Mori Seiki Co., Ltd.
International Classes:
G01B11/00; G02B7/28; H04N5/232
Domestic Patent References:
| JP60169707A | ||||
| JP2009236653A | ||||
| JP6325391A | ||||
| JP3264808A |
Attorney, Agent or Firm:
Akira Koike
Seiji Iga
Toshiya Fujii
Nobuhiro Noguchi
Yusei Atsuya
Seiji Iga
Toshiya Fujii
Nobuhiro Noguchi
Yusei Atsuya