Title:
DISPLACEMENT MEASURING EQUIPMENT
Document Type and Number:
Japanese Patent JP3609271
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an equipment for measuring relative displacement of a pair of members moving relatively with high accuracy regardless of temperature variation.
SOLUTION: The displacement measuring equipment comprises a scale 11 fixed to one member 28 of a pair of member moving relatively, and a detector 12 fixed to the other member 24A and reading the graduation on the scale 11 wherein the scale 11 is fixed to one member 28 through a rolling bearing 5. Since frictional force between the scale 11 and the one member 28 can be reduced even if they exhibit different expansion/contraction upon variation of the ambient temperature, the strain based on thermal stress can be reduced, and since an error in the coefficient of temperature correction can be reduced, a sufficient measurement accuracy can be ensured even in case of high accuracy measurement.
Inventors:
Shigeo Norinori
Kazuaki Kawarai
Kazuaki Kawarai
Application Number:
JP30096398A
Publication Date:
January 12, 2005
Filing Date:
October 22, 1998
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B21/00; G01D5/245; (IPC1-7): G01B21/00; G01D5/245
Domestic Patent References:
JP6185950A | ||||
JP4506868A | ||||
JP62110186A | ||||
JP60121313A |
Attorney, Agent or Firm:
Kinoshita Minoru
Kanji Nakayama
Kanji Nakayama
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