Title:
表示装置とその製造方法および製造装置
Document Type and Number:
Japanese Patent JP4474108
Kind Code:
B2
Abstract:
Apparatus for fabricating a display device includes a stage capable of mounting an insulating substrate of the display device and moving the insulating substrate, linear scales which detect a position or moving distance of the substrate, a laser oscillator which generates continuous-waves laser light, a modulator which turns ON/OFF the continuous-wave laser light, a beam forming optic which shapes the continuous-wave laser light passing through the modulator into a linear or rectangular form, an objective lens which projects the at least one of the laser light on the insulating substrate so as to irradiate the insulating substrate with the laser light. The controller counts signals generated by the linear scales for every movement of the stage for a given distance, causes the modulator to turn the generated continuous-wave laser light in an ON state at time when a position of the insulating substrate on which the laser light irradiation is to be started reaches an area on which the laser light is projected, and causes the modulator to turn the generated continuous-wave laser light in an OFF state at another time.
Inventors:
Hongo Mikio
Uto Yukio
Nomoto Mineo
Toshihiko Nakata
Mutsuko Hatano
Shinya Yamaguchi
Okura Osamu
Uto Yukio
Nomoto Mineo
Toshihiko Nakata
Mutsuko Hatano
Shinya Yamaguchi
Okura Osamu
Application Number:
JP2003062938A
Publication Date:
June 02, 2010
Filing Date:
March 10, 2003
Export Citation:
Assignee:
Hitachi Displays Co., Ltd.
International Classes:
G02F1/1368; G09F9/30; G02F1/13; G09F9/35; H01L21/20; H01L21/268; H01L21/336; H01L21/77; H01L21/84; H01L27/32; H01L29/04; H01L29/786; H01L51/50; H05B33/02; H05B33/10
Domestic Patent References:
| JP2000243970A | ||||
| JP11121753A | ||||
| JP2001067019A | ||||
| JP2001142094A | ||||
| JP2002149087A | ||||
| JP5283356A | ||||
| JP2001210851A | ||||
| JP10041244A |
Attorney, Agent or Firm:
Yoji Onodera