PURPOSE: To restrain the occurrence of mist and to remove metal ions and high boiling point organic materials in a distillation apparatus in which a heat source and a liquid chemical vapor condenser are installed in the lower part and in the upper part respectively by installing a means for blowing inert gas into liquid chemicals.

CONSTITUTION: A distillation apparatus 10 for removing metal impurities and high boiling point organic materials in liquid chemicals consists of a heater 3 for vaporizing liquid chemicals 2 stored in the lower part of a body 1 and a liquid chemical vapor condenser 6 for condensing liquid chemical vapor in the upper part thereof. In the lower part of the vapor condenser 6, a pan 11 for recovering the condensed liquid chemicals is installed. Between a part for storing the liquid chemicals 2 and the liquid chemical vapor condenser 6, a demister 4 is installed. In this case, inert gas feeding piping 8 in which blow-in ports 9 for blowing inert gas such as nitrogen and helium into the liquid chemicals to be distilled are formed in the liquid chemicals 2 is installed. In this way, the bumping and the occurrence of mist are restrained to reduce the occurrence of heavy metal contamination, water mark or the like of the device.