Title:
DLC PROTECTIVE FILM, ORGANIC EL ELEMENT USING THE SAME AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JP3175712
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an organic EL element having sufficient adhesion and fineness of a film and a protective film with a thin film thickness formed in it.
SOLUTION: In this organic EL element, an anode 2, an organic EL element layer 3 and a cathode 4 are laminated in this order on a glass substrate 1, and a DLC protective film 5 is formed on the glass board so as to cover them. The DLC protective film is structured by laminating a backing film 6 of amorphous silicon and at least two or more layers of DLC, and among the laminated layers, a first protective carbon film 7 adhering to the backing film formed on the glass board is formed by a CVD method or a spattering method under the condition having a partial hydrogen pressure of about 20% in which internal stress gets small, and a second carbon film 8 laminated on its top is formed by the CVD method or the spattering method under the condition in which hydrogen growing its density is not practically contained.
Inventors:
Toshihiko Motomatsu
Application Number:
JP30184598A
Publication Date:
June 11, 2001
Filing Date:
October 23, 1998
Export Citation:
Assignee:
NEC
International Classes:
H01L21/314; H01L51/50; H01L21/205; H05B33/04; H05B33/10; H05B33/12; H01L51/52; (IPC1-7): H05B33/04; H01L21/205; H05B33/10
Domestic Patent References:
| JP7102377A | ||||
| JP10261487A | ||||
| JP5101885A | ||||
| JP63259994A | ||||
| JP10275680A | ||||
| JP1041067A | ||||
| JP479192A |
Other References:
セラミックス，Ｖｏｌ２７，Ｎｏ．３，（１９９２），ｐｐ．２１９−２２５「膜状ダイヤモンドとアモルファス炭素膜」
Attorney, Agent or Firm:
Asamichi Kato