DOUBLE-SIDE TAPE FOR FIXING POLISHING PAD

Title:

DOUBLE-SIDE TAPE FOR FIXING POLISHING PAD

Document Type and Number:

Japanese Patent JP2007245276

Kind Code:

A

Abstract:

To provide a double-side tape for fixing a polishing pad, which firmly fixes the polishing pad to a polishing surface plate or a cushion material with excellent durability against hydrogen peroxide diluted slurry liquid.

The tape is provided with a base material 2 made of polyethylene terephthalate resin fiber nonwoven fabric having basic weight of 7-30 g/m2and rubber based pressure-sensitive adhesive layers 3 laminated on both sides of the base material 2.

Inventors:

SAKAI KENJI
KATO KENJI

Application Number:

JP2006070856A

Publication Date:

September 27, 2007

Filing Date:

March 15, 2006

Export Citation:

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Assignee:

SEKISUI CHEMICAL CO LTD

International Classes:

B24B37/04; B32B5/24; B32B27/00; C09J7/02; C09J11/06; C09J109/06; C09J153/02; H01L21/304

Domestic Patent References:

JP2005294412A	2005-10-20
JPH06228513A	1994-08-16
JP2003041741A	2003-02-13
JP2003213559A	2003-07-30
JP2003136397A	2003-05-14
JPH11116923A	1999-04-27
JP2005161490A	2005-06-23

Attorney, Agent or Firm:

Katsunori Sugimoto

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