To provide an extraction electrode capable of improving stability and accuracy of observation and measurement, in relation to an extraction electrode incorporated in a device for observing and measuring a sample of a scanning atom probe (SAP), an electric field ion type microscope or the like as an ion source or an electron source.
This extraction electrode 1 comprises an electrode part 2 and an insulating layer 3, is formed into a funnel-like shape as a whole, and has a hole 4 for passing ions vaporized from a sample formed at a tip. The electrode part 2 is formed by using platinum, tungsten or the like as a material; the insulating layer 3 is formed by an aerosol deposition method by using a material having a low dielectric constant such as alumina; the insulating layer 3 is slightly projected from the tip of the electrode part 2; and a space is formed between the tip of the extraction electrode 1 and a surface of the sample by the projecting amount thereof.
COPYRIGHT: (C)2006,JPO&NCIPI
Hisato Ogiso
Jun Akiwatari
| JP200214027A | ||||
| JP9189680A |
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